Probe Station

Brand: Janis
Model: ST-500

The Janis ST-500 is a research instrument designed to provide affordable vacuum and cryogenic probing of wafers (up to 2”) and devices. Low vibration technology provides superior sample positional stability.

Main features of Model ST-500 Probe Stations (from the manufacturer):

• Low vibration level and the positional drift
• Temperature range from ~3.5 K to 475 K
• Works either with liquid nitrogen or liquid helium
• Helium consumption less than 1 liter/hour
• Accommodates up to 2” (51 mm) diameter wafers
• Up to seven cooled, easily interchangeable, micro-manipulated probe arms
• Electrical measurements from DC to 67 GHz
• Wide variety of inexpensive LF probe tips that are easy to replace
• Very low triaxial probe arms leakage current of just a few fA
• Non-contact, non-destructive Kelvin probes
• Multi-tip probes
• Fiber probe arms with single and multi mode fiber options
• Optional optical access through the sample mount for transmission measurements
• Additional electrical feedthroughs with cables and wires to sample area
• Special miniature vacuum chamber to transfer sample under vacuum from Glove Box to Probe Station
• Very smooth X-Y-Z- travel stages for all monoscope system assemblies
• System customization options